General musings on model calibration, measurement methodology, and calibration of process tools, etc. As a whole, some of this is a rather OCD approach. However the intent is not that everything need be done every time, but that a TCAD engineer ought to be aware of these details, potential issues, and apply them as needed.
Process simulation is more difficult in many ways than device simulation. The physics for process simulation is almost always newer and less well understood. For leading edge processes, the technique and or equipment is new, and often has been made to work with an imperfect knowledge of the science. It is also harder to get …